| Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films | |
| Shen, Yanbai1; Zhang, Baoqing1; Cao, Xianmin1; Wei, Dezhou1; Ma, Jiawei1; Jia, Lijun1; Gao, Shuling1; Cui, Baoyu1; Jin, Yongcheng2 | |
| 2014-03-01 | |
| 发表期刊 | SENSORS AND ACTUATORS B-CHEMICAL
 |
| 卷号 | 193页码:273-279 |
| 摘要 | Pt-loaded WO3 thin films were deposited on oxidized Si substrates under various discharge gas pressures at room temperature using reactive magnetron sputtering. Structural characterizations by means of X-ray diffraction and field emission scanning electron microscopy show that the films composed of nano-size grains have a monoclinic structure. The films become more porous as the discharge gas pressure increases due to the decrease in film density and the increase in effective surface area. Gas sensing properties demonstrate that the films show reversible response to H2S with various concentrations. Under the same operating conditions the sensor response increases and the operating temperature at which the maximum response is shown decreases with discharge gas pressure. The highest response of 3512 is obtained for a Pt-loaded porous film deposited at 12Pa upon exposure to 5 ppm H2S at an operating temperature of 100 degrees C. Such a high response of a Pt-loaded porous film at a low operating temperature is discussed in relation to the Schottky-barrier-limited transport as well as the chemical mechanism of Pt loading. (C) 2013 Elsevier B.V. All rights reserved. |
| 文章类型 | Article |
| 关键词 | Wo3 Thin Film Sputtering Platinum H2s Gas Sensor |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| DOI | 10.1016/j.snb.2013.11.106 |
| 关键词[WOS] | EFFECTIVE SURFACE-AREA ; GAS SENSORS ; CHEMICAL SENSORS ; TIN DIOXIDE ; OXIDE FILMS ; SNO2 ; NANOSTRUCTURES ; SENSITIVITY ; ADDITIVES |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS研究方向 | Chemistry ; Electrochemistry ; Instruments & Instrumentation |
| WOS类目 | Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation |
| WOS记录号 | WOS:000330113600040 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.qibebt.ac.cn/handle/337004/6217 |
| 专题 | 先进界面技术研究组 |
| 作者单位 | 1.Northeastern Univ, Coll Resources & Civil Engn, Shenyang 110819, Peoples R China 2.Chinese Acad Sci, Qingdao Inst Bioenergy & Bioprocess Technol, Qingdao 266101, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shen, Yanbai,Zhang, Baoqing,Cao, Xianmin,et al. Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films[J]. SENSORS AND ACTUATORS B-CHEMICAL,2014,193:273-279. |
| APA | Shen, Yanbai.,Zhang, Baoqing.,Cao, Xianmin.,Wei, Dezhou.,Ma, Jiawei.,...&Jin, Yongcheng.(2014).Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films.SENSORS AND ACTUATORS B-CHEMICAL,193,273-279. |
| MLA | Shen, Yanbai,et al."Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films".SENSORS AND ACTUATORS B-CHEMICAL 193(2014):273-279. |
| 条目包含的文件 | 条目无相关文件。 | |||||
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