Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films

doi:10.1016/j.snb.2013.11.106

QIBEBT-IR > 先进界面技术研究组

	Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films
	Shen, Yanbai 1; Zhang, Baoqing 1; Cao, Xianmin 1; Wei, Dezhou 1; Ma, Jiawei 1; Jia, Lijun 1; Gao, Shuling 1; Cui, Baoyu 1; Jin, Yongcheng 2
	2014-03-01
发表期刊	SENSORS AND ACTUATORS B-CHEMICAL
卷号	193 页码:273-279
摘要	Pt-loaded WO3 thin films were deposited on oxidized Si substrates under various discharge gas pressures at room temperature using reactive magnetron sputtering. Structural characterizations by means of X-ray diffraction and field emission scanning electron microscopy show that the films composed of nano-size grains have a monoclinic structure. The films become more porous as the discharge gas pressure increases due to the decrease in film density and the increase in effective surface area. Gas sensing properties demonstrate that the films show reversible response to H2S with various concentrations. Under the same operating conditions the sensor response increases and the operating temperature at which the maximum response is shown decreases with discharge gas pressure. The highest response of 3512 is obtained for a Pt-loaded porous film deposited at 12Pa upon exposure to 5 ppm H2S at an operating temperature of 100 degrees C. Such a high response of a Pt-loaded porous film at a low operating temperature is discussed in relation to the Schottky-barrier-limited transport as well as the chemical mechanism of Pt loading. (C) 2013 Elsevier B.V. All rights reserved.
文章类型	Article
关键词	Wo3 Thin Film Sputtering Platinum H2s Gas Sensor
WOS标题词	Science & Technology ; Physical Sciences ; Technology
DOI	10.1016/j.snb.2013.11.106
关键词[WOS]	EFFECTIVE SURFACE-AREA ; GAS SENSORS ; CHEMICAL SENSORS ; TIN DIOXIDE ; OXIDE FILMS ; SNO2 ; NANOSTRUCTURES ; SENSITIVITY ; ADDITIVES
收录类别	SCI
语种	英语
WOS研究方向	Chemistry ; Electrochemistry ; Instruments & Instrumentation
WOS类目	Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS记录号	WOS:000330113600040
引用统计
文献类型	期刊论文
条目标识符	http://ir.qibebt.ac.cn/handle/337004/6217
专题	先进界面技术研究组
作者单位	1.Northeastern Univ, Coll Resources & Civil Engn, Shenyang 110819, Peoples R China 2.Chinese Acad Sci, Qingdao Inst Bioenergy & Bioprocess Technol, Qingdao 266101, Peoples R China
推荐引用方式 GB/T 7714	Shen, Yanbai,Zhang, Baoqing,Cao, Xianmin,et al. Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films[J]. SENSORS AND ACTUATORS B-CHEMICAL,2014,193:273-279.
APA	Shen, Yanbai.,Zhang, Baoqing.,Cao, Xianmin.,Wei, Dezhou.,Ma, Jiawei.,...&Jin, Yongcheng.(2014).Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films.SENSORS AND ACTUATORS B-CHEMICAL,193,273-279.
MLA	Shen, Yanbai,et al."Microstructure and enhanced H2S sensing properties of Pt-loaded WO3 thin films".SENSORS AND ACTUATORS B-CHEMICAL 193(2014):273-279.